1
Katsuyuki Musaka
Katsuyuki Musaka, Shinzuke Mizuno: Method of forming a thin film for a semiconductor device. Applied Materials, Birgit E Morris, Michael B Einschlag, November 5, 1996: US05571571 (32 worldwide citation)


A method of forming conformal, high quality silicon oxide films that can be deposited over closely spaced, submicron lines and spaces without the formation of voids, comprises forming a plasma of TEOS and a selected halogen-containing gas in certain ratios. By proper control of the energy sources th ...


2
Thomas Hellmuth, Jay Wei: Optical coherence tomography corneal mapping apparatus. Carl Zeiss, Michael B Einschlag, February 13, 1996: US05491524 (275 worldwide citation)


Optical coherence tomography ("OCT") corneal mapping apparatus includes an OCT apparatus having a rotating helical mirror for altering a reference beam path in the OCT apparatus; a raster scanner for raster scanning sampling optical output from the OCT apparatus; a curved mirror for transferring the ...


3
Ygal Arbel, Timothy L Wilson, Gordon Ford, Cathy Arledge, Tracy L Rust: Method and apparatus for handling incoming telephone calls. ROLM Company, Michael B Einschlag, January 4, 1994: US05276731 (239 worldwide citation)


Method and apparatus for handling incoming telephone calls and, in particular: (a) for delivering predetermined messages to predetermined calling parties; (b) predetermined, prioritorized screening of incoming telephone calls; and (c) for re-routing incoming telephone calls on the basis of predeterm ...


4
Jay Wei, Thomas Hellmuth: Optical coherence tomography assisted surgical apparatus. Carl Zeiss, Michael B Einschlag, December 21, 1999: US06004314 (226 worldwide citation)


Ophthalmologic surgical microscope which is combined internally with an optical coherence tomography ("OCT") apparatus wherein auto-focusing is provided by driving a motorized internal focusing lens of the ophthalmologic surgical microscope with a signal output from the OCT apparatus. An embodiment ...


5
Jay Wei, David Huang, Christopher L Petersen: Optical coherence tomography with new interferometer. Carl Zeiss, Michael B Einschlag, April 25, 2000: US06053613 (218 worldwide citation)


Embodiments of the present invention are method and apparatus for simply and economically providing efficient scanning in an optical coherence tomography ("OCT") apparatus. In particular, an embodiment of the present invention is an OCT apparatus which examines an object, which OCT apparatus compris ...


6
Carl A Inpyn: Package for electronic components. Control Products, Michael B Einschlag, June 16, 1992: US05122925 (217 worldwide citation)


Package for electronic components of a switch, which switch includes sensing components such as thermistor, measuring components, and output-control components, some of which components are relatively highly power-dissipative. A first portion of the switch supports the thermistor in a bushing wherei ...


7
Thomas Hellmuth, Michael Kaschke, John C Moore, Gerhard Unold: OCT-assisted surgical microscope with multi-coordinate manipulator. Carl Zeiss, Michael B Einschlag, August 18, 1998: US05795295 (208 worldwide citation)


Embodiments of the present invention provide method and apparatus for use during a neurosurgical procedure to enable a multi-coordinate manipulator ("MCM") to locate blood vessels and nerves in a patient's brain with submillimeter resolution. In addition, embodiments of the present invention provide ...


8
Phillip J Petillo: Apparatus for microsurgery. Michael B Einschlag, July 10, 1990: US04940468 (192 worldwide citation)


Apparatus for removing tissues such as vitreous humer from an eye has an outer needle having an aperture near one end; an inner tube disposed partially within the outer needle, having a sharp end and another end to which a vacuum is applied; a drive system for reciprocating the inner tube within the ...


9
Lawrence C Lei, Ilya Perlov, Karl A Littau, Alan F Morrison, Mei Chang, Ashok K Sinha: Chemical vapor deposition chamber with a purge guide. Applied Materials, Michael B Einschlag, B Todd Patterson, May 14, 1996: US05516367 (178 worldwide citation)


Vacuum CVD chambers are disclosed which provide a more uniformly deposited thin film on a substrate. The chamber susceptor mount for the substrate is heated resistively with a single coil firmly contacting the metal of the susceptor on all sides, providing uniform temperatures across the susceptor m ...


10
Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo, Alex Schreiber, Talex Sajoto, Stefan Wolff, Charles Dornfest, Michal Danek: Thermally floating pedestal collar in a chemical vapor deposition chamber. Applied Materials, Charles S Guenzer, Michael B Einschlag, December 8, 1998: US05846332 (165 worldwide citation)


A substrate processing chamber, particularly a chemical vapor deposition (CVD) chamber used both for thermal deposition of a conductive material and a subsequently performed plasma process. The invention reduces thermal deposition of the conductive material on peripheral portions of the pedestal sup ...



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