1
Abdurrahman Sezginer, Kenneth C Johnson, Fred E Stanke: Overlay alignment metrology using diffraction gratings. Therma Wave, Stallman & Pollock, November 16, 2004: US06819426 (189 worldwide citation)


Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. ...


2
Abdurrahman Sezginer, Roy Prasad: Apparatus and method for breaking up and merging polygons. Cadence Design Systems, Sheppard Mullin Richter & Hampton, March 17, 2009: US07506300 (173 worldwide citation)


A method of modifying polygons in a data set mask-less or mask based optical projection lithography includes: 1) mapping the data set to a figure-of-demerit; 2) moving individual polygon edges to decrease the figure-of-demerit; and 3) disrupting the set of polygons to enable a further decrease in th ...


3
Abdurrahman Sezginer, Bayram Yenikaya: Method for checking printability of a lithography target. Cadence Design Systems, Sheppard Mullin Richter & Hampton, July 28, 2009: US07568174 (150 worldwide citation)


A technique for determining, without having to perform optical proximity correction, when the result of optical proximity correction will fail to meet the design requirements for printability. A disclosed embodiment has application to a process for producing a photomask for use in the printing of a ...


4
Abdurrahman Sezginer: Method and apparatus of model-based photomask synthesis. Cadence Design Systems, Sheppard Mullin Richter & Hampton, January 20, 2009: US07480891 (147 worldwide citation)


An apparatus and method for improving image quality in a photolithographic process includes calculating a figure-of-demerit for a photolithographic mask function and then adjusting said photolithographic mask function to reduce the figure of demerit.


5
Robert L Kleinberg, Abdurrahman Sezginer, Masafumi Fukuhara: Nuclear magnetic resonance pulse sequences for use with borehole logging tools. Schlumberger Doll Research, David P Gordon, Peter Y Lee, June 11, 1991: US05023551 (119 worldwide citation)


An NMR pulse sequence for use in the borehole environment is provided which combines a modified fast inversion recovery (FIR) pulse sequence with a series of more than ten, and typically hundreds, of CPMG pulses according to


6
Robert L Kleinberg, Douglas D Griffin, Masafumi Fukuhara, Abdurrahman Sezginer, Weng C Chew: Borehole measurement of NMR characteristics of earth formations. Schlumberger Technology Corporation, Martin M Novack, Leonard W Pojunas, October 8, 1991: US05055787 (96 worldwide citation)


Borehole NMR logging apparatus and methods, and methods for the interpretation thereof. A logging tool is provided which produces a strong, static and homogeneous magnetic field B.sub.0 in a Volume of an adjacent formation on one side of the tool to measure nuclear magnetic resonance characteristics ...


7
Abdurrahman Sezginer: Overlay targets with isolated, critical-dimension features and apparatus to measure overlay. Therma Wave, Stallman & Pollock, May 16, 2006: US07046376 (78 worldwide citation)


An optical metrology system is disclosed which is configured to minimize the measurement of specularly reflected light and measure primarily scattered light. The system is similar to prior art beam profile measurements but includes a movable baffle to selectively block specularly reflected light. In ...


8
Robert L Kleinberg, Douglas D Griffin, Masafumi Fukuhara, Abdurrahman Sezginer: Borehole measurement of NMR characteristics of earth formations. Schlumberger Technology Corporation, Martin M Novack, Leonard W Pojunas, October 8, 1991: US05055788 (71 worldwide citation)


Borehole NMR logging apparatus and methods, and methods for the interpretation thereof. A logging tool is provided which produces a strong, static and homogeneous magnetic field B.sub.0 in a Volume of an adjacent formation on one side of the tool to measure nuclear magnetic resonance characteristics ...


9
Adam E Norton, Kenneth C Johnson, Fred E Stanke, Abdurrahman Sezginer: Spectroscopic ellipsometer without rotating components. Therma Wave, Stallman & Pollock, June 22, 2004: US06753961 (64 worldwide citation)


A spectroscopic ellipsometer having a multiwavelength light source, spectrometer (or wavelength-scanning monochromator and photodetector), a polarizer and polarization analyzer, and one or more objectives in the illumination and collection light paths, further comprises a stationary polarization mod ...


10
Abdurrahman Sezginer: Determining bound and unbound fluid volumes using nuclear magnetic resonance pulse sequences. Schlumberger Technology Corporation, Leonard W Pojunas, November 8, 1994: US05363041 (62 worldwide citation)


A borehole logging tool comprises a Nuclear Magnetic Resonance (NMR) tool and is pulsed according to a selected sequence. An interpretation is performed which involves a singular value decomposition and compression of data obtained by the tool. The compressed data is then subjected to a nonegative, ...



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