21
Alexandros T Demos, Hari K Ponnekanti, Jun Zhao, Helen R Armer, William R Livesay, Scott C Woods: Large area source for uniform electron beam generation. Applied Materials, Moser Patterson & Sheridan, December 14, 2004: US06831284 (50 worldwide citation)


An electron beam apparatus that includes a vacuum chamber, a large-area cathode disposed in the vacuum chamber, and a first power supply connected to the cathode. The first power supply is configured to apply a negative voltage to the cathode sufficient to cause the cathode to emit electrons toward ...


22
Jun Zhao, Lee Luo, Xiao Liang Jin, Jia Xiang Wang, Talex Sajoto, Stefan Wolff, Leonid Selyutin, Ashok Sinha: High temperature, high flow rate chemical vapor deposition apparatus and related methods. Applied Materials, Townsend and Townsend and Crew, February 20, 2001: US06189482 (45 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 Å/minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for ...


23
Jun Zhao, Lee Luo, Xiaoliang Jin, Frank Chang, Charles Dornfest, Po Tang: Chemical vapor deposition vaporizer. Applied Materials, Thomason Moser & Patterso, April 3, 2001: US06210485 (40 worldwide citation)


The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the vaporization of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, for ...


24
Talex Sajoto, Jun Zhao, Vincent Ku, Charles Dornfest: Cold trap. Applied Materials, Thomason Moser & Patterson, May 23, 2000: US06066209 (40 worldwide citation)


The invention relates to an apparatus and process for filtering deposition gases in a substrate processing system. Particularly contemplated is an apparatus and process for the filtering deposition gases of a metal-oxide film deposited on a silicon wafer to make integrated circuits. In one embodimen ...


25
Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin, Stefan Wolff, Lee Luo, Harold Mortensen, Richard Palicka: High temperature ceramic heater assembly with RF capability and related methods. Applied Materials, Townsend and Townsend, October 19, 1999: US05968379 (32 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for b ...


26
Jun Zhao, Talex Sajoto, Leonid Selyutin, Charles Dornfest, Stefan Wolff, Lee Luo, Eller Juco: Apparatus for ceramic pedestal and metal shaft assembly. Applied Materials, Townsend & Townsend, November 30, 1999: US05994678 (31 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for b ...


27
Mark C Simonson, Jun Zhao, Jaesung Cha: Statistical impact analysis computer system. CFI Group, Harness Dickey & Pierce, February 20, 2001: US06192319 (30 worldwide citation)


A computer-implemented apparatus and method for determining the impacts of predetermined customer characteristics associated with measured physical attributes. A manifest variable database is utilized for storing manifest variable data that is indicative of the measured physical attributes. A partia ...


28
Lisa C McLonlogue, Jun Zhao, Sukanto Sinha: Transgenic rodent comprising APP-Swedish. Elan Pharmaceuticals, Townsend and Townsend and Crew, June 12, 2001: US06245964 (29 worldwide citation)


The invention provides transgenic non-human animals and transgenic non-human mammalian cells harboring a transgene encoding an APP polypeptide comprising the Swedish mutation.


29
Talex Sajoto, Charles Dornfest, Leonid Selyutin, Jun Zhao, Vincent Ku, Xiao Liang Jin: Temperature controlled gas feedthrough. Applied Materials, Moser Patterson & Sheridan, March 4, 2003: US06527865 (29 worldwide citation)


The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. In one aspect, an apparatus and process for the control of a gas flowed through a gas feedthrough in a substrate processing chamber and system is provided. In ...


30
Xiaoliang Jin, Christopher P Wade, Xianzhi Tao, Elaine Pao, Yaxin Wang, Jun Zhao: CVD ruthenium seed for CVD ruthenium deposition. Applied Materials, Adler & Associates, November 12, 2002: US06479100 (28 worldwide citation)


The present invention provides a method of forming a ruthenium seed layer on a substrate comprising the steps of introducing a ruthenium-containing compound into a CVD apparatus; introducing oxygen into the CVD apparatus; maintaining an oxygen rich environment in the process chamber for the initial ...



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