1
Talex Sajoto, Leonid Selyutin, Jun Zhao, Stefan Wolff: High temperature multi-layered alloy heater assembly and related methods. Applied Materials, Townsend & Townsend and Crew, March 7, 2000: US06035101 (184 worldwide citation)


The present invention provides systems, methods and apparatus for heating substrates in a processing chamber to temperatures up to at least 700.degree. C. In accordance with an embodiment of the invention a heater assembly with an inner core of high thermal conductivity is encased in a shell of lowe ...


2
Jun Zhao, Talex Sajoto, Leonid Selyutin: Heater for use in substrate processing apparatus to deposit tungsten. Applied Materials, Townsend and Townsend and Crew, January 30, 2001: US06179924 (114 worldwide citation)


The present invention provides a simplified heater design that is scaleable for equipment processing different diameter substrates and that can efficiently and economically process substrates to meet stringent film requirements such as film uniformity for fabricating high integration devices. The pr ...


3
Leonid Selyutin, Jun Zhao: Self aligning lift mechanism. Applied Materials, Peters Verny Jones & Biksa, September 14, 1999: US05951776 (111 worldwide citation)


A particular configuration of a compact self-aligning lift mechanism is provided for lifting the stem of a pedestal in a processing chamber while minimizing process anomalies due to geometric misalignment and binding of moving pieces. The force associated with supporting a stem in a processing chamb ...


4
Sasson Somekh, Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin, Vincent Ku, Chris Wang, Frank Chang, Po Tang: Vaporization and deposition apparatus. Applied Materials, Thomason Moser & Patterson, July 10, 2001: US06258170 (88 worldwide citation)


The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a s ...


5
Talex Sajoto, Leonid Selyutin, Jun Zhao, Charles Dornfest: Temperature controlled gas feedthrough. Applied Materials, Thomason Moser & Patterson, May 2, 2000: US06056823 (64 worldwide citation)


The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a s ...


6
Jun Zhao, Lee Luo, Xiao Liang Jin, Jia Xiang Wang, Talex Sajoto, Stefan Wolff, Leonid Selyutin, Ashok Sinha: High temperature, high flow rate chemical vapor deposition apparatus and related methods. Applied Materials, Townsend and Townsend and Crew, February 20, 2001: US06189482 (45 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 Å/minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for ...


7
Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin, Stefan Wolff, Lee Luo, Harold Mortensen, Richard Palicka: High temperature ceramic heater assembly with RF capability and related methods. Applied Materials, Townsend and Townsend, October 19, 1999: US05968379 (32 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for b ...


8
Jun Zhao, Talex Sajoto, Leonid Selyutin, Charles Dornfest, Stefan Wolff, Lee Luo, Eller Juco: Apparatus for ceramic pedestal and metal shaft assembly. Applied Materials, Townsend & Townsend, November 30, 1999: US05994678 (31 worldwide citation)


The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for b ...


9
Talex Sajoto, Charles Dornfest, Leonid Selyutin, Jun Zhao, Vincent Ku, Xiao Liang Jin: Temperature controlled gas feedthrough. Applied Materials, Moser Patterson & Sheridan, March 4, 2003: US06527865 (29 worldwide citation)


The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. In one aspect, an apparatus and process for the control of a gas flowed through a gas feedthrough in a substrate processing chamber and system is provided. In ...


10
Leonid Selyutin, Talex Sajoto, Jun Zhao: Self-aligning lift mechanism. Applied Materials, Peters Verny Jones & Biksa, September 19, 2000: US06120609 (27 worldwide citation)


An improved lift mechanism includes a configuration having two sections of bellows welded to a central flange. The central flange provides support for a precisely aligned lift pin support structure. The efficient utilization of space provides space for an enlarged stem while minimizing the interacti ...



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