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Deodatta Shenai-Khatkhate
Deodatta Vinayak Shenai Khatkhate, Michael L Timmons, Charles J Marsman, Egbert Woelk, Ronald L DiCarlo Jr: Delivery device. Rohm and Haas Electronic Materials, S Matthew Cairns, May 25, 2010: US07722720 (11 worldwide citation)


Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with ...


2
Deodatta Shenai-Khatkhate
Deodatta Vinayak Shenai Khatkhate, Michael Brendan Power, Ronald L DiCarlo Jr: Trialkylindium preparation. Shipley Company L L C, S Matthew Cairns, August 3, 2004: US06770769 (5 worldwide citation)


Trialkylindium compounds are prepared by reacting indium trihalide with a trialkylaluminum compound in the presence of a fluoride salt, wherein the molar ratio of the indium trihalide to the fluoride salt is at least 1:4.5. Such trialkylindium compounds are particularly suitable for use in metalorga ...


3
Deodatta Shenai-Khatkhate
Deodatta Vinayak Shenai Khatkhate, Ronald L DiCarlo Jr: Organoindium compounds. Shipley Company L L C, S Matthew Cairns, January 20, 2004: US06680397 (4 worldwide citation)


Disclosed are trialkylindium compounds containing two bulky alkyl groups that are liquids or easily liquefiable solids and have sufficient vapor pressure for use in vapor deposition processes, as well as methods of depositing indium containing films using such compounds.


4
Deodatta Shenai-Khatkhate
Deodatta Vinayak Shenai Khatkhate, Ronald L DiCarlo Jr: Organometallic compound purification. Rohm and Haas Electronic Materials, S Matthew Cairns, January 22, 2008: US07321048 (2 worldwide citation)


A method of purifying an organometallic compound by heating the organometallic compound in the presence of a trialkyl aluminum compound and a catalyst.


5
Deodatta Shenai-Khatkhate
Deodatta Vinayak Shenai Khatkhate, Michael Brendan Power, Artashes Amamchyan, Ronald L DiCarlo Jr: Alkyl group VA metal compounds. Shipley Company L L C, S Matthew Cairns, October 18, 2005: US06956127 (1 worldwide citation)


Disclosed are methods of preparing monoalkyl Group VA metal dihalide compounds in high yield and high purity by the reaction of a Group VA metal trihalide with an organo lithium reagent or a compound of the formula RnM1X3−n, where R is an alkyl, M1 is a Group IIIA metal, X is a halogen and n is an i ...


6
Deodatta Shenai-Khatkhate
Deodatta Vinayak SHENAI KHATKHATE, Michael L Timmons, Charles J Marsman, Egbert Woelk, Ronald L DiCarlo JR: Delivery device. Rohm and Haas Electronic Materials, S Matthew Cairns, December 2, 2010: US20100300361-A1


Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with ...


7
Egbert Woelk, Ronald L DiCarlo Jr: Method and apparatus. Rohm and Haas Electronics Materials, S Matthew Cairns, August 6, 2013: US08501266 (4 worldwide citation)


Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.


8
Egbert Woelk, Ronald L DiCarlo Jr: Vapor delivery device, methods of manufacture and methods of use thereof. Rohm and Haas Electronic Materials, Cantor Colburn, July 15, 2014: US08776821 (1 worldwide citation)


A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point d ...


9
Egbert Woelk, Ronald L DiCarlo Jr: Method for constant concentration evaporation and a device using the same. Rohm and Haas Electronic Materials, Cantor Colburn, October 15, 2013: US08555809


Disclosed herein is a device comprising an evaporator; and a heat exchanger; the heat exchanger being in fluid communication with evaporator; evaporator comprising an outer casing; and an inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner ca ...


10
Egbert Woelk, Ronald L DiCarlo Jr: Vapor delivery device, methods of manufacture and methods of use thereof. ROHM AND HAAS ELECTRONIC MATERIALS, Cantor Colburn, January 26, 2016: US09243325


A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the deliver ...



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