21
Rand William A, Kaufman Jerome: Visual pulmonary meter. January 18, 1972: US3635214 (52 worldwide citation)


A pocket-sized pulmonary meter which includes a hollow cylindrical chamber for slidably receiving a piston. A breathing tube assembly communicating with one end of the cylindrical chamber forms a flow passageway terminating with a mouthpiece through which a patient can exhale into the cylindrical ch ...


22
Elwood K Pierce Jr: Pressure balanced gate valve having selective actuator systems. Petroleum Designers, James L Jackson, October 28, 1980: US04230299 (51 worldwide citation)


A pressure balanced gate valve mechanism wherein a closed loop fluid interchange system interconnects the valve actuator stem area of the valve mechanism with the pressure balancing stem area and functions to accomodate volumetric changes to prevent the development of a hydraulic lock that might oth ...


23
Hongyong Zhang, Naoto Kusumoto: Method for annealing a semiconductor. Semiconductor Energy Laboratory, Gerald J Ferguson Jr, Eric J Robinson, Sixbey Friedman Leedom & Ferguson PC, January 19, 1999: US05861337 (50 worldwide citation)


A method for manufacturing a semiconductor device including preparing a multi-chamber system having at least first and second chambers, the first chamber for forming a film and the second chamber for processing an object with a laser light; processing a substrate in one of the first and second chamb ...


24
Paul R Orum, Larry A Vyvial: Manual override for hydraulic gate valve actuators. ACF Industries Incorporated, Eugene N Riddle, July 22, 1980: US04213480 (49 worldwide citation)


A double acting manual override mechanism for the hydraulic actuator of a subsea gate valve, and a visual indicator device for indicating the gate position. The gate is normally held open by hydraulic pressure and is moved by a spring to a fail closed position in the event of a malfunction. The over ...


25
Joseph Maher, Richard W Olmsted: Integrated turbo pump and control valve system. MKS Instruments, McDermott Will & Emery, December 19, 2000: US06161576 (49 worldwide citation)


A gas delivery system comprises a gate valve that can be connected between a turbo pump and a process chamber. The gate valve includes a valve body, a valve seat and a housing constructed to support the valve seat, wherein (a) the valve body is secured within the housing so as to move relative to th ...


26
Masasi Saito, Teruo Iwata, Nobuo Ishii, Towl Ikeda, Hiroaki Saeki: Reduced pressure processing system and reduced pressure processing method. Tokyo Electron, Oblon Spivak McClelland Maier & Neustadt, May 24, 1994: US05314541 (49 worldwide citation)


A reduced pressure processing system includes a load lock chamber having an opening communicating with a process atmosphere in which a wafer is processed and/or the outer air atmosphere, a gate valve which is arranged at the opening to close/open the chamber with respect to the process atmosphere an ...


27
Douglas A Wood: Flow control systems. Technicon Isca, Trexler Bushnell & Wolters, October 19, 1982: US04354622 (47 worldwide citation)


Apparatus for controlling the rate of flow of a powdered solid material such as flour, comprising a load cell supporting an inclined plate onto which the flour particles impinge after falling through an inclined gate valve. The output of the load cell is fed to a control circuit including a direct p ...


28
Jack A Dimock: Wafer processing machine. Sputtered Films, Harry E Aine, June 18, 1985: US04523985 (45 worldwide citation)


A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a chuck carried from the inside surface of the door. A clamping ring clamps the wafer to the chuck and adv ...


29
Ruben F Lah: Coke drum bottom de-heading system. Curtiss Wright Flow Control Corporation, Michael F Krieger, Kirton & McConkie, December 9, 2003: US06660131 (45 worldwide citation)


The present invention features a coke drum de-heading system that provides unique advantages over prior art de-heading systems, namely the de-heading of a coke drum without having to physically remove the head units. This is essentially accomplished using a specially designed dual seated, linear mot ...


30
Yuusuke Sato, Toshimitsu Ohmine, Takaaki Honda: Substrate processing apparatus and substrate processing method. Kabushiki Kaisha Toshiba, Toshiba Kikai Kabushiki Kaisha, Foley & Lardner, April 27, 1999: US05897710 (44 worldwide citation)


A substrate such as a semiconductor wafer is transferred to a plurality of process chambers so as to perform prescribed processes. An inspection chamber is air-tightly connected to each of the process chambers. The inspection chamber is provided with a handler which loads and unloads the substrate. ...



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