1
Talex Sajoto, Leonid Selyutin, Jun Zhao, Stefan Wolff: High temperature multi-layered alloy heater assembly and related methods. Applied Materials, Townsend & Townsend and Crew, March 7, 2000: US06035101 (184 worldwide citation)


The present invention provides systems, methods and apparatus for heating substrates in a processing chamber to temperatures up to at least 700.degree. C. In accordance with an embodiment of the invention a heater assembly with an inner core of high thermal conductivity is encased in a shell of lowe ...


2
Sajoto Talex, Selyutin Leonid, Zhao Jun, Wolff Stefan: A high temperature multi-layered alloy heater assembly and related methods. Applied Materials, BERNADICOU Michael A, September 30, 1999: WO/1999/049501


The present invention provides systems, methods and apparatus for heating substrates in a processing chamber to temperatures up to at least 700 °C. In accordance with an embodiment of the invention a heater assembly with an inner core of high thermal conductivity in encased in a shell of lower therm ...


3
Sajoto Talex, Selyutin Leonid, Zhao Jun, Wolff Stefan: A high temperature multi-layered alloy heater assembly and related methods. Applied Materials, November 6, 2006: KR1020067022227


The present invention provides systems, methods and apparatus for heating substrates in a processing chamber to temperatures up to at least 700 °C. In accordance with an embodiment of the invention a heater assembly with an inner core of high thermal conductivity in encased in a shell of lower t ...


4
Sajoto Talex, Selyutin Leonid, Zhao Jun, Wolff Stefan: A high temperature multi-layered alloy heater assembly and related methods. Applied Materials, May 25, 2001: KR1020007010683


The present invention provides systems, methods and apparatus for heating substrates in a processing chamber to temperatures up to at least 700 °C. In accordance with an embodiment of the invention a heater assembly with an inner core of high thermal conductivity in encased in a shell of lower t ...



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